Members

Principal Investigator
計畫主持人

Luh-Maan Chang 張陸滿

Endowed Chair on High-Tech Fab Engineering, Engineering College, National Taiwan University
Director, High-Tech Facility Research Center, National Taiwan University
Professor Emeritus, National Taiwan University and Purdue University

Education

Ph.D. C.E., The University of Texas at Austin

Experience

Researcher, Research Center of Climate Change and Sustainable Development, National Taiwan University
Professor, Department of Civil Engineering, National Taiwan University
Professor Emeritus, Civil Engineering and Construction Engineering Management, Purdue University, West Lafayette, USA
Facility Engineer, ITRI, Research Park Development and Integrated Circuit Demonstration Plant Construction

CO-Principal Investigator
共同主持人

Shang-Hsien (Patrick) Hsieh 謝尚賢

CO-Principal Investigator in Center Research Projects (共同計畫主持人)

To Enhance Sustainable Engineering Technology For Effectively Managing TSMC 300mm Fab Facility,June 2018-Dec. 2021,TSMC

Education

Ph.D. CE., Cornell University, Ithaca, NY

Experience

Chairman, Department of Civil Engineering, National Taiwan University
Professor, Department of Civil Engineering, National Taiwan University
Director, Research Center for Building and Infrastructure Information Modeling and Management
Executive Secretary, National Program on Applying Science and Technology for Disaster Reduction

CO-Principal Investigator
共同主持人

Po-Han Chen 陳柏翰

CO-Principal Investigator in Center Research Projects (共同計畫主持人)

To Enhance Sustainable Engineering Technology For Effectively Managing TSMC 300mm Fab Facility,June 2018-Dec. 2021,TSMC

Education

Ph.D. Purdue University

Experience

Professor, Department of Civil Engineering, National Taiwan University

CO-Principal Investigator
共同主持人

Shih-Cheng Hu 胡石政

CO-Principal Investigator in Center Research Projects (共同計畫主持人)

To Construct UPA Nano-Environment

Education

Ph.D. University of Liverpool

Experience

Professor, Department of Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology

Principal Investigator
主持人

Kuen-Yu Tsai 蔡坤諭

Principal Investigator in Center Research Projects (主持人)

Distributed high-performance simulation technology for imaging process, equipment and environment of nano ( CO-PI with Lum-Maan Chang).

Education

Ph.D. Stanford University

Experience

Senior Process Engineer in lithography of Intel Corporation
Associate Professor, Department of Electrical Engineering, National Taiwan University

CO-Principal Investigator
共同主持人

Yu-Lin (Eugene) Song 宋昱霖

CO-Principal Investigator in Center Research Projects (共同計畫主持人)

An Innovative Active and Passive Integrated System to Apply Cancelling ELF Magnetic Field for the Next-Generation Nano-Scale High-Tech Facilities Application, Aug. 2020 - July 2021, MOST
High-Tech Facility Intelligent Degaussing System Research project, May. 2019-Jul. 2021.

Education

Ph.D. Physics, National Taiwan University
M.S. Physics, National Tsing Hua University

Experience

Assistant professor, Department of Bioinformatics and Medical Engineering, Asia University
Adjunct assistant professor, Department of Physics, National Taiwan Normal University
Adjunct research fellow,Biomedical Engineering Research and Development Center, National Yang-Ming University

Sr. Adviser

C. M. Hsueh 薛春明

High-Tech Facility Research Center, NTU

Education

Ph. D, Department of Civil Engineering, National Taiwan University
M.S., Department of Civil Engineering, National Taiwan University

Experience

Secretary-General, Taipei City

Sr. Adviser

C. Y. Kao 高慶揚

High-Tech Facility Research Center, NTU

Education

Ph. D, National Taiwan University
EMBA, National Tsing Hua University

Experience

Sr. Director, Facility Operation and Construction Division, UMC

Postdoctoral Researcher

Hung-Yi Lin 林宏益

An Innovative Active and Passive Integrated System to Apply Cancelling ELF Magnetic Field for the Next-Generation Nano-Scale High-Tech Facilities Application, Aug. 2020 - July 2021, MOST
High-Tech Facility Intelligent Degaussing System Research project, May. 2019-Jul. 2021.

Education

Ph.D., Department of Electrical Engineering, National Cheng Kung University.
M.S., Department of Electrical Engineering, National Cheng Kung University.
B.Sc., Department of Industrial Education, National Taiwan Normal University.

Experience

Project Manager, Biomedical Engineering Research and Development Center, National Yang-Ming University.
Senior Engineer, FitiPower Integrated Technology Inc.
Senior Engineer, United Microelectronics Corporation (UMC).
Senior Engineer, China Steel Corporation (CSC).
Postdoctoral researcher, National Cheng Kung University.

Senior Technology Research Specialist

Sheng-Wei Chien 錢盛偉

Senior Technology Research Specialist, Prof. Kuen-Yu Tsai’s group, Department of Electrical Engineering, National Taiwan University

Education

M.S., Department of Electrical Engineering, National Taiwan University
B.S., Department of Mechanical Engineering, National Cheng Kung University

Experience

Senior Technology Research Specialist, Prof. Kuen-Yu Tsai’s group, Department of Electrical Engineering, National Taiwan University

Technology Research Specialist

Jia-Syun Cai 蔡佳勳

Technology Research Specialist, Nanoscale Design and Fabrication Systems Laboratory, Department of Electrical Engineering , National Taiwan University
Education
M.S., Graduate Institute of Electronics Engineering, National Taiwan University.
B.S., Department of Electronic and Computer Engineering, National Taiwan University of Science and Technology.
Experience
Technology Research Specialist, Nanoscale Design and Fabrication Systems Laboratory, Department of Electrical Engineering, National Taiwan University

Research Assistant

Chien-Lin Lee 李建霖 

Ph.D. candidate, Nanoscale Design and Fabrication Systems Laboratory, Department of Electrical Engineering, National Taiwan University

Education

Ph.D. candidate, Graduate Institute of Electronics Engineering, National Taiwan University.
B.S., Department of Electrical Engineering, National Taiwan University.

Experience

Ph.D. candidate, Nanoscale Design and Fabrication Systems Laboratory, Department of Electrical Engineering, National Taiwan University

Executive Secretary

Sophia Liu 劉佳蓉

SEMI Taiwan High-Tech Facility Committee

Education

B.S., Foreign Language, Hsuan Chuang University

Experience

Secretary, Taiwan Information Storage Association

Administrative Secretary

Peggy Ho 何珮琳

SEMI Taiwan High-Tech Facility Committee
An Innovative Active and Passive Integrated System to Apply Cancelling ELF Magnetic Field for the Next-Generation Nano-Scale High-Tech Facilities Application, Aug. 2020 - July 2021, MOST
High-Tech Facility Intelligent Degaussing System Research project, May. 2019-Jul. 2021.

Education

M.S., National Pingtung University of Science and Technology

Experience

Assistant, Agricultural Technology Research Institute
Research Assistant, National Tsing Hua University
Deputy engineer, Tsing Hua Technology Co., Ltd.
Research Assistant, National Pingtung University of Science and Technology

Administrative Secretary

Nicole Chang 張祐瑋

SEMI Taiwan High-Tech Facility Committee
To Enhance Sustainable Engineering Technology For Effectively Managing TSMC 300mm Fab Facility, Mar 2019-, TSMC

Education

Master of Design (Honours), University of New South Wales, Australia

Research Assistant

Winters Tseng 曾文良

SEMI Taiwan High-Tech Facility Committee

Education

M.S., Pure Mathematics, University of Illinois at Urbana-Champaign
M.S., Theoretical Computer Science, National Taiwan University

Experience

Visiting Scholar, Department of Mathematics, Princeton University

Research Assistant

Shang-Shiuh (Philip) Chang 張上緖

SEMI Taiwan High-Tech Facility Committee

Education

MBA Candidate, Accounting and Operations, National Taiwan University
B.S. Finance, International Studies, Journalism, Indiana University
Dual enrollment, Purdue University

Experience

Taiwan Director, Hult Prize Foundation
Transaction Advisory
Strategic Communications

Research Assistant

Han-Lin (John) Chen 陳漢霖

To Construct UPA Nano-Environment

Education

M.S., Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology
B.S., Mechanical Engineering, Tatung University

Experience

Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology

Research Assistant

Yu-Nung (Frankie) Huang 黃育農

To Construct UPA Nano-Environment

Education

M.S. Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology
B.S. Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology

Experience

Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology

Research Assistant

Wei-Hao (Mars) Lai 賴韋豪

To Construct UPA Nano-Environment

Education

M.S. Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology
B.S. Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology

Experience

Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology

Research Assistant

Chung-Chun (Nick) Wang 王中群

To Construct UPA Nano-Environment

Education

M.S. Energy and Refrigerating Air-Conditioning Engineering,National Taipei University of Technology
B.S. Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology

Experience

Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology

Research Assistant

Shao-Wei Wu 吳紹瑋

An Innovative Active and Passive Integrated System to Apply Cancelling ELF Magnetic Field for the Next-Generation Nano-Scale High-Tech Facilities Application, Aug. 2020 - July 2021, MOST
High-Tech Facility Intelligent Degaussing System Research project, May. 2019-Jul. 2021.

Education

B.Sc., Electrical Engineering, National United University

Experience

Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology

Research Assistant

Kuan-Yo Chen 陳冠佑

An Innovative Active and Passive Integrated System to Apply Cancelling ELF Magnetic Field for the Next-Generation Nano-Scale High-Tech Facilities Application, Aug. 2020 - July 2021, MOST
High-Tech Facility Intelligent Degaussing System Research project, May. 2019-Jul. 2021.

Education

B.Sc., Electrical Engineering, Chinese Culture University

Experience

Assistant Engineer, MiTAC Information Technology Corp.
Research Assistant, Center for Cleaning Technology Research, National Taipei University of Technology