EMI

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The extremely low frequency(ELF) magnetic fields influence the yield of CMOS foundry. The poor yield happened because of ELF magnetic fields inducing directly the measurement or process equipment for cutting-edge chips below 22 nanometer process.The equipment of Electron microscopes, included SEMs, TEMs, STEMs , FIB writers and E-Beam Writers are very susceptible to ELF magnetic fields from various electrical power sources outside of the building and within CMOS foundry recommends a maximum of 0.3 mG .Our research team focus on How to reduce the ELF below 0.1mG . ​

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