High - Tech Facility Research Center National Taiwan University at Zhubei 臺大竹北分部高科技廠房設施研究中心
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EMI


The extremely low frequency(ELF) magnetic fields influence the yield of CMOS foundry. The poor yield happened because of ELF magnetic fields inducing directly the measurement or process equipment for cutting-edge chips below 22 nanometer process.The equipment of Electron microscopes, included SEMs, TEMs, STEMs , FIB writers and E-Beam Writers are very susceptible to ELF magnetic fields from various electrical power sources outside of the building and within CMOS foundry recommends a maximum of 0.3 mG .Our research team focus on How to reduce the ELF below 0.1mG . ​
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  • About us 關於我們
    • Definition of High-Tech Facility
    • Importance of High-Tech Facility
  • Research 研究
    • Members
    • Research Interests
    • Projects
  • Teaching 教學
  • Service 服務