National Taiwan University HIGH-TECH FACILITY RESEARCH CENTER
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EMI


The extremely low frequency(ELF) magnetic fields influence the yield of CMOS foundry. The poor yield happened because of ELF magnetic fields inducing directly the measurement or process equipment for cutting-edge chips below 22 nanometer process.The equipment of Electron microscopes, included SEMs, TEMs, STEMs , FIB writers and E-Beam Writers are very susceptible to ELF magnetic fields from various electrical power sources outside of the building and within CMOS foundry recommends a maximum of 0.3 mG .Our research team focus on How to reduce the ELF below 0.1mG . ​
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  • About us
    • Definition of High-Tech Facility
    • Importance of High-Tech Facility
  • Research
    • Members
    • Research Interests
    • Projects
  • Teaching
  • Service