High - Tech Facility Research Center National Taiwan University at Zhubei 臺大竹北分部高科技廠房設施研究中心
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AMC​


This research is to detect boron phosphorous air molecular contamination in clean room. Present method is not effective. The researcher must spend 24 hours or more to collect boron and phosphorous contamination in clean room. This severely inhibits efficient production process. There is a need to shorten the duration to timely detect the boron and phosphorous contamination within a few hours. ​
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  • About us 關於我們
    • Definition of High-Tech Facility
    • Importance of High-Tech Facility
  • Research 研究
    • Members
    • Research Interests
    • Projects
  • Teaching 教學
  • Service 服務