National Taiwan University HIGH-TECH FACILITY RESEARCH CENTER
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AMC​


This research is to detect boron phosphorous air molecular contamination in clean room. Present method is not effective. The researcher must spend 24 hours or more to collect boron and phosphorous contamination in clean room. This severely inhibits efficient production process. There is a need to shorten the duration to timely detect the boron and phosphorous contamination within a few hours. ​
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  • About us
    • Definition of High-Tech Facility
    • Importance of High-Tech Facility
  • Research
    • Members
    • Research Interests
    • Projects
  • Teaching
  • Service